Foreword Preface Introduction to CAFM: History, Experimental and Current Status Reliability of Polycrystalline Thin Oxides and Insulators Investigation of High-k Dielectric Stacks by TUNA and CAFM: Advantages, Limitations and Applications 3D Tomography for Analyzing Conductive Filaments for Resistive Random Access Memory Devices CAFM Applications for Energy Efficient and High-Frequency Electronics Local Anodic Oxidation with AFM Tips CAFM Studies of Low-Dimensional Materials Design of a Logarithmic Amplifier for CAFM Resiscopes for Analyzing Wide Dynamic Current Ranges Combination of CAFM with the Probestation for Characterization of Resistive Switching and Channel Hot Carriers Degradation in FETs Multiprobe CAFM Scanning Capacitance Microscopy as a Complementary Tool for CAFM KPFM and its Use to Characterize the CPD in Different Materials Hot-Electron Nanoscopy Using Adiabatic Compression of Surface Plasmons Fabrication and Reliability of AFM Nanoprobes sakriti opis