Laser-based Etching Technique for Micro/Nano Patterning of Transparent Materials (engleski)
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Laser-induced backside wet etching (LIBWE) is a promising technique for direct patterning of trans-parent materials with high quality. LIBWE causes laser etching at the back surface of the transparent sample that is in contact with an absorbing liquid. In this work, the etch process has been...
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