On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems (engleski)

· TUDpress Verlag der Wissenschaften GmbH · 2012 · meʒuzvezana · 216 stranica

Kirchner, Oswald Robert

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This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based... pročitati sve

Izdavač: TUDpress Verlag der Wissenschaften GmbH
Kod:
Godina izdavanja: 2012
Jezik: Engleski jezik
Uvez: Meʒuzvezana
Broj stranica: 216
Širina pakiranja: 14.8 cm
Visina pakiranja: 21 cm
Dubina pakiranja: 1.3 cm
Težina pakiranja: 320 g