Enabling Technologies for MEMS and Nanodevices (engleski)

· Wiley-VCH · 2013 · meʒuzvezana · 427 stranica

Baltes, Henry

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PREFACE§§M3: THE THIRD DIMENSION OF SILICON§§TRENDS IN MEMS COMMERCIALIZATION§§CAPACITIVE INTERFACES FOR MEMS§§PACKAGING OF ADVANCED MICRO- AND NANOSYSTEMS§§HIGH-FREQUENCY INTEGRATED MICROELECTROMECHANICAL RESONATORS§§MEMS IN MASS STORAGE SYSTEMS§§SCANNING MICRO- AND NANOPROBES FOR... pročitati sve

Izdavač: Wiley-VCH
Kod:
Godina izdavanja: 2013
Jezik: Engleski jezik
Uvez: Meʒuzvezana
Broj stranica: 427
Širina pakiranja: 17 cm
Visina pakiranja: 24 cm
Dubina pakiranja: 2.6 cm